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AXIS Supra by Kratos Analytical

The AXIS Supra by Kratos Analytical is a high performance multi-technique surface science instrument combining high-sensitivity X-ray photoelectron spectroscopy (XPS) with a dual anode Al/Ag monochromatic X-ray source, high resolution scanning field emission Auger electron spectroscopy and microscopy (AES, SAM), ultraviolet photoelectron spectroscopy (UPS), ion scattering spectroscopy (ISS) and reflection electron energy loss spectroscopy (REELS)

 

The Supra is capable of parallel XPS imaging and scanning Auger microscopy (SAM) with a spatial resolution as high as 1.0 and 0.1 micron, respectively.

 

The system is equipped with a gas cluster ion source (GCIS) producing focused energetic Ar ion beam in both monoatomic and cluster mode for state-of-the-art sputter cleaning and depth profiling of any inorganic or organic material, conductive or insulating.

 

The analysis chamber is outfitted with an integral charge neutralizer for the analysis of non-conductive materials, sample cooling/heating (-150°C to 800°C, and flash up to 1000°C), gas dosing and a residual gas analyzer (RGA)

 

A UHV surface science station (SSS) attached to the analysis chamber provides additional features including sample cooling/heating, broad spot ion etching, gas dosing, crystal cleaver, 4-pocket e-beam evaporator, residual gas analyzer and sample storage dock.

 

In addition, an integrated glove box enables air-free sample fabrication, preparation, and transfer to the Supra’s UHV preparation chamber.

 

The AXIS-Supra has unparalleled automation and user-friendly software for sample handling, data acquisition and processing.