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AXIS Supra by Kratos Analytical

The AXIS Supra by Kratos Analytical is a high performance multi-technique surface science instrument combining high-sensitivity X-ray photoelectron spectroscopy (XPS) with Al/Ag monochromatic X-ray source, high resolution Auger electron spectroscopy (AES), ultraviolet photoelectron spectroscopy (UPS), and ion scattering spectroscopy (ISS).


The Supra is capable of fast imaging XPS and AES with a spatial resolution as high as 1.0 and 0.1 micron, respectively.


The system is equipped with a multi-mode monatomic Ar+ and Arn+ gas cluster ion source (GCIS) for state-of-the-art sputter cleaning and depth profiling of any inorganic or organic material, conductive or insulating.


The analysis chamber is outfitted with a charge neutralization gun, sample cooling/heating (-100°C to 800°C, and up to 1000°C for short periods), and gas dosing.


A UHV sample preparation chamber attached to the analysis chamber provides additional features including sample cooling/heating, ion etching, gas dosing, crystal cleaver, 4-pocket e-beam evaporator, and sample storage dock.


In addition, an integrated glove box enables air-free sample fabrication, preparation, and transfer to the Supra’s UHV preparation chamber.

The Supra has unparalleled automation and user-friendly software for data acquisition and processing.