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Angstrom Engineering EvoVac Glovebox Evaporator

 

Angstrom Engineering EvoVac Glovebox Evaporator

Angstrom Engineering EvoVac glovebox-integrated thermal and electron beam evaporator located in room 1301 of Calit2 is capable of depositing planar and nano/microstructured thin films of a wide range of materials, including metals, oxides,and organics. Its key features include the following:

-6-pocket electron beam evaporation source and 3 thermal evaporation sources with integrated shutters, multiple deposition rate monitors, and co-deposition capability.
-Variable angle substrate stage (0.1 degree tilt angle precision; up to 6 inch diameter wafers) appropriate for glancing angle deposition (GLAD) technique for fabricating nanostructured thin films.
-Substrate heating to 400C.
-Integrated 4-glove glove box for manipulating/loading air sensitive samples.
-Excellent automation and software control of multi-step deposition recipes.

An instrumental standard operation procedure (SOP) can be downloaded. In order to use the instrument in phase 2, users need to complete the Returning to Campus training and daily health check-in, and follow the IMRI phase 2 safety SOP.  Please note that the instrument is in a shared space. Users need to keep 6ft distance if another user needs to pass through the space.