FEI Magellan 400 SEM

The FEI Magellan 400 SEM is an extreme high resolution scanning electron microscope equipped with a new monochromated electron column. This SEM enables sub-nanometer resolution and high surface sensitivity at low landing energies, and is capable of light element analysis, fast elemental mapping, electron beam lithography and low voltage (15-30kV) STEM.

Electron Source & Operating HT: Field emission gun 1kV~30kV

Resolution:

• Resolution @ optimum WD
–– 0.8 nm at 15 kV
–– 0.8 nm at 2 kV
–– 0.9 nm at 1 kV
–– 1.5 nm at 200 V

• Resolution @ coincident point
–– 0.8 nm at 15 kV
–– 0.9 nm at 5 kV
–– 1.2 nm at 1 kV

Operation mode:

• SEM
• STEM (ADF, BF)

Detectors and Attachments:

• Everhart-Thornley Detector
• Through-the-lens detector (TLD)
• Concentric backscatter electron (CBS) detector
• Scanning transmission electron microscopy (STEM) detector
• EDS: Oxford silicon drift detector (80 mm²) and both INCA and AZtec software
• Nabity NPGS (nanometer pattern generation system)