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FEI Quanta 3D FEG Dual Beam (SEM/FIB)

FEI Quanta 3D FEG is located in room 1302 Calit2 Building (building 325 on UCI campus map)

The FEI Quanta 3D FEG is a state-of-the-art dual-beam (SEM/FIB) instrument. It is capable of high resolution surface imaging (1nm resolution at 30kV), fast composition analysis, crystal structure determination, orientation mapping, micromachining, Pt deposition, and TEM specimen preparation. It may be operated under different vacuum modes, for example, high vacuum, low vacuum and environmental (ESEM). Either dry inorganic samples or hydrated biological samples can be observed in this instrument. 

Electron Source & Operating HT: Field emission gun 1kV~30kV

Electron beam resolution

  • High-vacuum
    1.2 nm at 30 kV (SE)
    2.5 nm at 30 kV (BSE)*
    2.9 nm at 1 kV (SE)
  • Low-vacuum
    1.5 nm at 30 kV (SE)
    2.5 nm at 30 kV (BSE)
    2.9 nm at 3 kV (SE)
  • Extended low-vacuum mode (ESEM)
    1.5 nm at 30 kV (SE)

Focus Ion Beam resolution:

  • 7 nm at 30 kV at beam coincident point (5 nm achievable at optimal working distance)

Electron optics

  • High-resolution field emission – SEM column optimized for high-brightness/ high-current
  • 60 degree objective lens geometry with through-the-lens differential pumping and heated objective apertures

Ion optics

  • High-current ion column with Ga liquid-metal ion source
  • Acceleration voltage: 2 – 30 kV
  • Probe current: 1 pA – 65 nA in 15 steps
  • 15-position aperture strip
  • Magnification 40 x – 1280 kx in "quad" mode at 10 kV

Detectors and Attachments:

  • Everhardt-Thornley SED
  • Low-vacuum SED (used in low vacuum)
  • Gaseous SED (GSED) (used in ESEM mode)
  • Solid-State BSED
  • Gaseous analytical BSED (GAD) (used for low-vacuum analytical applications)
  • EDS: Oxford silicon drift detector (50 mm2) and INCA software
  • HKL EBSD (Electron Backscatter Diffraction) systems

Additional capability:

FP 2300/12 Peltier Stage

When cooled between 0 and 10 °C, specimens of very diverse nature can be imaged and analyzed at relative humidity conditions up to 100% (typical chamber pressures required are in the range 3-10 mbar). With the Peltier stage, humidity cycling experiments can be performed to characterize the sample's morphology and phase distribution at various relative humidity conditions.

In-situ freeze-drying can be performed when the temperature range of the Peltier stage is set below 0 °C with a minimum of –20 °C. The Peltier stage can also heat the sample up to ~60°C. The temperature and the ramp-up profile are directly controlled through the user interface of the microscope PC. When ordering this item for Versa 3D LoVac, ESEM Mode (1018239) must be present as well.