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Hitachi Regulus 8230 ultra high resolution SEM

Hitachi Regulus 8230 FEG SEM is an ultra high resolution SEM installed in IMRI MC2 facililty (140B ET) in June 2019. 

This is a loaner system from Hitachi High-Technologies CorporationIt and offers 0.7 nm resolution with an excellent performance at low kV. Two EDS detectors together with BSE detectors are helpful for fast compositional analysis and elemental maps.


Thursday, June 20, 2019 - 12:30