SEM/FIB – Instruments

Tescan GAIA3

Tescan GAIA3 SEM-FIB

Nickname: TescanStatus: Operational

The GAIA-3 GMH FIB-SEM is TESCAN’s newest, highest-end flagship dualbeam instrument. It has a unique three-lens electron optical design capable of dedicated modes for extreme high-resolution imaging (magnetic immersion mode, just like the FEI Magellan), enhanced depth of focus, undistorted ultra-low magnification imaging, and live 3D stereo imaging. The smart chamber design of the GAIA GMH FIB-SEM instrument allows for the simultaneous milling and collection of EBSD patterns without the need to move the sample. This flexibility is unique to TESCAN and will provide best-in-class accuracy and throughput for EBSD and EDS. The 3D-EDS and EBSD reconstructions are critical for understanding the structure and chemistry of materials. This FIB-SEM is the only such system that can be integrated with a time of flight secondary ion mass spectrometer (TOF-SIMS), which is planned for the future.

FEI_Magellan

FEI Magellan 400 XHR SEM

Nickname: MagellanStatus: Operational

The FEI Magellan 400 SEM is the world’s first extreme high resolution scanning electron microscope equipped with a new monochromated electron column. This SEM can provide unmatched surface-sensitive imaging at the subnanometer level from 30 kV down to 1 kV. The Magellan is equipped with a through the lens detector (TLD), a retractable backscatter detector, retractable STEM detector, beam deceleration capabilities, and an Oxford EDS with AZtec software. It is capable of light element analysis, fast elemental mapping, electron beam lithography (EBL), and low voltage (15-30 kV) STEM. Learn More…

FEI_Quanta3D

FEI Quanta 3D FEG Dual Beam (SEM/FIB)

Nickname: Quanta 3DStatus: Operational

The Quanta™ 3D DualBeam™ FEG FIB-SEM combines a Focused Ion Beam (FIB) with a high-resolution Field Emission Gun Scanning Electron Microscope (FEG-SEM). This combination provides enhanced 2D and 3D materials characterization and analysis for a wide range of samples. A focused Ga Ion beam allows for micro and nano-scale cutting of materials during TEM sample preparation, EBSD surface milling, and automated milling scripts for micro-pillar patterns. The microscope is equipped with a gas injector system for platinum deposition and an Omniprobe micromanipulator for in-situ sample lift-out. Additionally, the FIB provides a “slice and view” technique that allows for 3D reconstruction of a sample, providing the ability to image and analyze subsurface features. Featuring three imaging modes – high vacuum, low vacuum and ESEM, it accommodates the widest range of samples of any SEM system: either dry inorganic samples or hydrated biological samples can be observed in this instrument.  The Quanta 3D FEG’s novel, field-emission electron source delivers clear and sharp electron imaging and increased electron beam current enhances EDS and EBSD analysis. The integrated Oxford silicon drift detector (50 mm2) using INCA software, and  HKL EBSD (Electron Backscatter Diffraction) systems brings new capabilities and flexibility to engineers and researchers needing chemical composition analysis, element distribution, crystallographic orientation, grain size and distribution.

FEI XL-30

FEI XL-30 FEGSEM

Nickname: XL-30Status: Operational

The Philips XL 30 is a conventional SEM with a field emission gun. This SEM provides both secondary electron and backscattered electron imaging, as well as a EDS system. The XL 30 has a 4 axis motorized stage with full manual override. Learn More…