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Hitachi Regulus 8230 ultra high resolution SEM

Hitachi Regulus 8230 FEG SEM is an ultra high resolution SEM installed in IMRI MC2 facililty (140B ET) in June 2019. 

Hitachi Regulus 8230 SEM employs a novel cold-field-emission (CFE) gun optimized for high-resolution imaging at low accelerating voltages. It has a resolution down to 0.7 nm with several detectors such as inlens SE and BSE, ET and retratable BSE detectors. It can be operated from 500 eV to 30keV routinely. Landing volatages lower than 500 eV can be achieved using BD system.
More detais about ultra-high resolution Scanning Electron Microscope Regulus Series can be found at Hitachi website. Two EDS detectors together with BSE detectors are helpful for fast compositional analysis and elemental maps.

This is a loaner system from Hitachi High-Technologies Corporation whose generous offer is highly apprciately.