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FEI Magellan 400 XHR SEM

 FEI Magellan 400 SEM is located in room 1302 Calit2 Building (building 325 on UCI campus map)

The FEI Magellan 400 SEM is an extreme high resolution scanning electron microscope equipped with a new monochromated electron column. This SEM enables sub-nanometer resolution and high surface sensitivity at low landing energies, and is capable of light element analysis, fast elemental mapping, electron beam lithography and low voltage (15-30kV) STEM.

Electron Source & Operating HT: Field emission gun 1kV~30kV

Resolution:

• Resolution @ optimum WD
–– 0.8 nm at 15 kV
–– 0.8 nm at 2 kV
–– 0.9 nm at 1 kV
–– 1.5 nm at 200 V

• Resolution @ coincident point
–– 0.8 nm at 15 kV
–– 0.9 nm at 5 kV
–– 1.2 nm at 1 kV

Operation mode:

  • SEM
  • STEM (ADF, BF)

Detectors and Attachments:

  • Everhart-Thornley Detector
  • Through-the-lens detector (TLD)
  • Concentric backscatter electron (CBS) detector
  • Scanning transmission electron microscopy (STEM) detector
  • EDS: Oxford silicon drift detector (80 mm2) and both INCA and AZtec software
  • Nabity NPGS (nanometer pattern generation system)