Angstrom Engineering EvoVac Glovebox Evaporator
| Location | 1301 Calit2 Building |
| Contact: | Dr. Qiyin Lin |
| Email: | qiyinl@uci.edu |
| EMERGENCY: | 9-1-1 |
| UCI Police: | (949) 824-5223 |
| UCI Medical Center: | (714) 456-6123 |
| EvoVac: | Usage ($) | Training ($) |
| UC Campuses |
151/102 | 40 |
| Other Academic |
19.51/132 | 52 |
| Industrial |
451/302 | 120 |
| Glove Box: | ||
| UC Campuses | 5 | |
| Other Academic | 6.5 | |
| Industrial | 15 |
NOTE: 1On-Peak rate. 2Off-Peak rate. Typical training time: 4 Hours. Training is billed per hour per person. Usage is billed per hour.
| Keycard Access: | Daytime or 24/7 |
| Instrument Access: | Daytime or 24/7 |
NOTE: Keycard access is required at all times to enter the TEM Labs. Users who have yet trained are not permitted to operate any lab instruments. Users who wish to bring guests are required to notify the Lab Manager in advance.
Description
This instrument is a custom engineered evaporator for both planar deposition and GLAD deposition for fabricating nanostructured columnar thin films. E-beam evaporation can be used to deposit materials with high melting points such as Ta, W, Ti, SiO2, Al2O3, etc. Thus, it is possible to deposit materials that cannot be evaporated with standard resistive thermal evaporation. In addition, e-beam evaporation can provide higher deposition rates than possible with either sputtering or resistive evaporation.
Integrated 4-port glovebox enables air-free/moisture-free sample fabrication, preparation, and transfer to the Evaporator deposition chamber.
Source Materials & Consumables
Thermal evaporation sources: Most thermal boats, wires, baskets, are compatible with each of our three thermal resistive sources as these simply clamp into place.
Electron beam crucibles: We have a Telemark branded hearth with six 15 cc pockets. It works with a variety of crucible styles and materials, but these must be compatible with the Telemark pocket design.
Source materials: Most metals, oxides, and organics may be used (any new deposition material needs approval from staff).
Suppliers: The above consumables may be purchased from several suppliers. Some of these include Angstrom Engineering, Kurt J. Lesker Co., R.D. Mathis, Materion, and International Advanced Materials. Angstrom Engineering who designed our system can provide consumables that are compatible with the Evaporator. They would be able to match the prices of any supplier. Technical Sales Representative contact is 519.894.4441 xt 119, mwoods@angstromengineering.com
Instrument Features
- Computer process control: Excellent automation and software control of multi-step deposition recipes. Automated operation
- Recipe-driven deposition: planar or GLAD thin-film processing
- Inficon deposition control: deposition rate feedback control for thermal and electron beam evaporation sources
- Glovebox: Four-port glovebox with purified N2 environment facilitates the loading of substrates and source materials sensitive to water and O2
Popular Applications
- Planar Deposition
- GLAD Deposition
- E-beam and Thermal Deposition
- Glovebox with N2 Inert Environment
Instrument Specifications
| Electron beam evaporation source | Six 15 cc pockets appropriate for oxides and metals; electron beam powered by 6 kW power source |
| Thermal evaporation sources | Three sources for thermal resistive boats and wires; appropriate for metals and organics; powered by 2500 VA source |
| High-precision variable angle GLAD substrate stage | Computer-controlled substrate rotation (0°, 360°) and tilt angle modulation (-95°-95°). High precision enables highly-oblique evaporant flux incident angles necessary for GLAD. A variable angle substrate stage (0.1° tilt angle precision; up to 6-inch diameter wafers) is appropriate for glancing angle deposition (GLAD) technique for fabricating nanostructured thin films |
| Substrate Heating | Backside radiant heating (up to ~ 400 °C) during deposition and in-situ annealing |
| Substrate Holder | Molybdenum holder accommodates substrates as large as one 150 mm (6”) diameter wafer |
| High Vacuum Chamber | Base pressures < 1 × 10-7 Torr; access through front and back doors |
Useful Information
Instruction & Brochure
Application Notes
SOP & Safety Documents
Standard Operating Procedures and Safety Documents are available to users who have obtained onsite training.