Tescan GAIA3 SEM-FIB
Location | 1150 Engineering Hall |
Contact: | Dr. Jian-Guo Zheng |
Email: | jzheng@uci.edu |
EMERGENCY: | 9-1-1 |
UCI Police: | (949) 824-5223 |
UCI Medical Center: | (714) 456-6123 |
Usage ($) | Training ($) | |
UC Campuses |
451/302 | 40.00 |
Other Academic |
58.51/392 | 52.00 |
Industrial |
1351/902 | 120.00 |
NOTE: 1On-Peak rate. 2Off-Peak rate. Typical training time: 5 Hours. Training is billed per hour per person. Usage is billed per hour.
Keycard Access: | Daytime or 24/7 |
Instrument Access: | Daytime or 24/7 |
NOTE: Keycard access is required at all times to enter the TEM Labs. Users who have yet trained are not permitted to operate any lab instruments. Users who wish to bring guests are required to notify the Lab Manager in advance.
Description
The GAIA-3 GMH FIB-SEM is TESCAN’s newest, highest-end flagship dualbeam instrument. It has a unique three-lens electron optical design capable of dedicated modes for extreme high-resolution imaging (magnetic immersion mode, just like the FEI Magellan), enhanced depth of focus, undistorted ultra-low magnification imaging, and live 3D stereo imaging. The smart chamber design of the GAIA GMH FIB-SEM instrument allows for the simultaneous milling and collection of EBSD patterns without the need to move the sample. This flexibility is unique to TESCAN and will provide best-in-class accuracy and throughput for EBSD and EDS. The 3D-EDS and EBSD reconstructions are critical for understanding the structure and chemistry of materials. This FIB-SEM is the only such system that can be integrated with a time of flight secondary ion mass spectrometer (TOF-SIMS), which is planned for the future.
Instrument Features
FIB
- Ga ion source
- Operating voltage: 0.5kV to 30kV
- Operating current: 1pA to 60 nA
SEM
- Field emission gun
- Operating voltages: 500V to 30 kV
Popular Applications
- SEM/EDS analysis
- SEM/EBSD analysis
- FIB lithography
- TEM sample preperation
Instrument Specifications
- Electron beam resolution in BDM: 0.7nm @ 15kV, 1.4nm @ 1kV, 2.2nm @ 200V
- Focus Ion Beam resolution: sub-2 nm images performed with gallium at 1pA, 2.5 nm resolution guaranteed
Useful Information
Instruction & Brochure
Application Notes
SOP & Safety Documents
Standard Operating Procedures